If a worker wants to do something good, he must first sharpen his tools. In today's globalized world, patents are not only a means of protecting innovation but have evolved into powerful weapons in the commercial battlefield. Mames Consulting has developed a patent operation platform specifically for MEMS, sensors, and IoT technologies. By integrating intellectual property resources across the entire industry chain, the company actively promotes the protection and efficient utilization of intellectual property. Among various sensor types, magnetic sensors are widely used in aerospace, geological exploration, consumer electronics, and automotive industries. According to Mames Consulting data, the global magnetic sensor market was valued at $1.64 billion in 2016 and is expected to grow at an annual rate of 8% over the next few years, reaching approximately $2.6 billion by 2022. Magnetic Sensor Market Forecast from 2016 to 2022 Currently, magnetic sensing technology is based on different working principles, such as Hall effect, AMR (Anisotropic Magnetoresistive), GMR (Giant Magnetoresistive), TMR (Tunnel Magnetoresistive), fluxgate, magnetic induction, and SQUID (Superconducting Quantum Interference Device). Each of these technologies has its own advantages and limitations, depending on the application requirements. The SQUID is currently the most sensitive magnetic sensor, with a resolution down to several fT. It is commonly used in measuring biological neuromagnetic signals, which are typically in the pT range or lower. However, it requires low-temperature environments, consumes significant power, and is vulnerable to electromagnetic interference, making it complex to operate. Hall sensors are cost-effective and reliable, often used for speed, position, and current sensing, but they suffer from zero offset and temperature sensitivity, requiring compensation circuits. Fluxgate sensors are ideal for detecting weak DC or low-frequency magnetic fields but are difficult to integrate and consume a lot of power. AMR sensors offer higher sensitivity than Hall sensors, up to 100 times better, and can detect tangential magnetic fields, making them suitable where Hall sensors fall short. However, they saturate under high magnetic fields and require complex reset procedures. GMR sensors have similar resolution to AMR but are more affected by temperature, and can be damaged by strong magnetic fields. To meet the growing demand for compact, low-cost, low-power, and high-sensitivity magnetic field sensors, researchers have turned to MEMS-based solutions. These sensors use the Lorentz force principle, involving a torsional resonant structure and a current-carrying coil. When an external magnetic field is present, the resonant structure is excited, and displacement is measured through optical, capacitive, or piezoresistive methods to determine the magnetic field strength. While MEMS magnetic sensors offer advantages like small size and low cost, increasing current in the coil to improve sensitivity leads to higher power consumption and heat generation, affecting stability. Additionally, nonlinearity becomes a concern at large displacements. To address these issues, the invention introduces a torsional micro-mechanical magnetic field sensor that operates using electrostatic driving, significantly reducing power consumption and improving linearity across a wide range of magnetic field measurements. Schematic Diagram of Top View of Torsional Micro-Mechanical Magnetic Field Sensor The torsional micro-mechanical magnetic field sensor of the present invention mainly consists of a resonant structure, a first insulating layer, an induction coil, and a drive electrode. The insulating layer is placed on the surface of the resonant structure, while the induction coil is located on top of it. The drive electrode is designed to electrostatically drive the resonant structure into a torsional resonance mode. This design allows the device to operate with near-zero power consumption, eliminating temperature-related stability issues. Furthermore, the sensor exhibits excellent linearity over a wide magnetic field range, making it a promising solution for future applications in various industries. Chamfered Radiator,Galvanized Chamfered Radiator,Corrosion Resistant Chamfered Radiator,Power Transformer Chamfered Radiator Shenyang Tiantong Electricity Co., Ltd. , https://www.ttradiator.com
